Park Systems Releases New AFM for 200mm Wafers
- ERiC Jay Miller
- Aug 10, 2024
- 1 min read
Park Systems has released the Park FX200 AFM, designed specifically for work with 200mm silicon wafers.
The system claims improved resistance to vibration and thermal drift, as well as faster Z servo performance. Other automation features are also mentioned, including automatic alignment and probe recognition.
