Hitachi Releases High Throughput Ultra-High-Rez SEM
- ERiC Jay Miller
- 5 days ago
- 1 min read
Tokyo based Hitachi High-Tech Corporation recently released the SU9600, and Ultrahigh Resolution SEM. The newest in Hitachi's line of in-lens UHR-SEM's, the SU9600 claims SE resolution of 0.4nm @ 30kV (gap method), and 0.34nm @ 30kV lattice resolution in STEM mode.
This instrument is highly specialized and often found in semiconductor manufacturing, or high end research laboratories.
